AJA
International ATC 1500-V & Orion Sputtering Systems
Preventive
Maintenance Checks (weekly, monthly & biannually)
Weekly
01 Check Thermo-NESLAB chiller:
a.
Check
water level (fill if necessary w/distilled water)
b.
Temperature
should be @ 18C
c.
Pressure
should be @ 62psi +/- 1.5
02 Check/record base pressure-Ion Gauge #1 (IG1)
03 Check/record (I) draw of LL & MC turbo pumps
04 Check shutter operation on all four
magnetrons
Monthly
(and gun short events)
01 Perform weekly checks
02 Clean out the chamber (record in log
sheet)
a.
Vent
the chamber according to procedure
b.
Open
all shutters and [using a clean vacuum hose] vacuum the entire chamber, including
the magnetrons whose chimneys have collected loose sputtered metal deposits
c.
If any
magnetron requires further cleaning, remove the shutter, chimney & space
shield: if a replacement kit (chimney & space shield) is not available, use
nylon scour pads (scotch-brite) and IPA to carefully remove loose sputtered
metal flakes that have collected on these assemblies. You may need to repeat this process several
times before clean-drying each assembly with N2
d.
Before
re-installing all parts, do another vacuum clean of the chamber w/the vacuum
hose while simultaneously spraying N2 to stir up all loose particles in the
chamber. Remove the vacuum hose and only
spray N2, concentrating on the target mounting blocks (underside of copper
cooling well); to prevent magnetron shorting
e.
Finally,
reinstall all parts and wipe down the chamber walls with IPA (chamber can then
close & pump down)
Biannually
01 Perform weekly check
02 Perform monthly checks
03 Inspect for crud/rust buildup in water
lines: if necessary, drain chiller & plumbing, then refill with new
distilled water (you will need to power down the system prior to shutting
off/draining the chiller - follow the power down procedure)
04 Inspect both roughing pumps: check oil
condition and level: (fill if low or replace entirely if oil is a thickening
black)
05 Inspect bellows: main chamber & load
lock (behind machine)
06 Inspect LL & MC turbo pumps; refill
lubricant reservoir according to schedule or if necessary
End
of procedure