- I received my BSEE, MSEE and Ph.D. in Electrical Engineering from
the University of Illinois at Urbana-Champaign in 1983, 1986 and 1988 respectively. I then
became an Assistant Professor at the University of Texas
at Dallas in late 1988. In 1994, I was promoted to Associate Professor with
tenure and in 2000 I was promoted to Full Professor, a position I currently hold. I am a member of the
American Vacuum Society, a Senior Member of the IEEE and a registered Professional
Engineer in the State of Texas.
- Press here for a more detailed Resume.
- Research interests:
- The primary focus of my research is on the plasmas used in
semiconductor device manufacturing. The research is primarily
experimental in nature as opposed to a simulation of plasmas
although my students have performed some plasma simulations. In particular, my group is
best known for our research into pulsed plasmas and ion-ion
plasmas. Pulsed-plasmas have the plasma source turned
on-and-off periodically, while ion-ion plasmas have only positive and negative ions in
them and no electrons. Both have significant advantages over continuous electron-ion
dominated plasmas that warrant commercialization. I and my students have developed several
diagnostics for studying these plasmas and consequently have extensive experience in
determining plasma kinetics. I have also studied plasma
source design and have a serious interest in MEMS device
processing. While there is a primary focus to My research, many different kinds of
projects have taken place in the Plasma Applications Labs. These projects have been
supported by the National Science Foundation, The State of Texas, and several different
companies. They have spanned the range from basic science to 1 week emergency
programs. As an example of recent work: in July of 2000 I and 4 colleagues at UTD
obtained a grant for a "Plasma Science Research and Research Training Facility."
This grant has provided the equipment for serious hands-on training of our students
in the plasma sciences related to semiconductor manufacturing, lighting, the ionosphere
and outer space.
- Press to see more about the capabilities of the Plasma Applications Laboratories (PAL).
- Press to see more about the Plasma Science Research and Research
Training Facility (PSR).
- Press to see example presentations.
- Press to see some of Dr. Overzet's Patents and Patent
- Press to see more about the costs of
research projects in the PAL.
- Teaching Interests:
- I have taught over 10 different courses including: "Solid
State Electronic Devices" at both the undergraduate (EE3310
and EE3210) and graduate (EE6320) levels, "Semiconductor Processing Technology" (EE6322), "Process Integration" (EE8320) and three courses on "Plasma
Processing of Materials" UTD's plasma related courses are expanding as we expand our
lab capabilities to form an integrated package of 7 classes. EE5383 "Plasma Technology" and its Laboratory (EE5283) comprise a hardware oriented study of
useful laboratory plasmas. It is designed to introduce both beginning graduate students
and upper level undergraduates to vacuum system hardware, basic plasma theory and some
uses of plasma. EE6383
"Plasma Science" and its Laboratory (EE6283) comprise a study of the fundamental properties, chemistry, diagnostics
and equations of plasmas. It is intended to move students one step closer to cutting
edge research. An engineer passing this class will understand why plasmas act
in the ways that they do and be a serious help on a manufacturing line. EE7383 "Advanced Plasma Processing
Systems" and its laboratory (EE7283) comprise an in-depth study of advanced plasma processing environments.
Finally, EE7171 is a
seminar in which we read and discuss current literature on plasma processing.
- Press to see course catalog information and
- Press to find out about how you could have Dr. Overzet (and UTD) teaching at your institution.
- The University of Texas allows professors to consult one day per
week "with requisite prior approval by the appropriate
university authority ... in cases where such activity is judged to be beneficial to the
University." The consulting activity should
ordinarily be "temporary, episodic, or intermittent" otherwise it will be "subject to much closer scrutiny in terms
of its impact on" the professor's "ability to fulfill adequately her/his
obligations to the University." Dr. Overzet has consulted for both companies
and Government Labs.
- Press to see more about Dr. Overzet's consulting.
- I am interested in getting new students to work with me.
Funding depends upon availability.
- Press to see information on present and past students.
- Press to fill out an application for a Research Assistant
position. RA/TA Application.
- My wife's name is Jan and we have four children: I enjoy
just about any sport, especially softball, basketball and golf. Maybe I shouldn't admit
this, but I am a Cubs fan (due to my Grandmother) and a Bulls fan. Most
importantly I am a follower of Christ and a member of a Christian
Reformed Church. named Bethel.
- Press to see some of my favorite Links to
other plasma related sites:
- Here is a link to latex style files for
writing a UTD thesis courtesy of some of my former grduate students. Several
students graduated using these and I hope you can too! (I make no guarantees though, the
required styles may change without notice.) Take them all.
University of Texas at Dallas,
P.O. Box 830688, EC33
Richardson, TX 75083-0688
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