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Sheath Resistance Measurements in the GEC Reference Reactor.L. J. OverzetUniversity of Texas at Dallas, Plasma Applications LabSheath Resistance Measurements in the GEC Reference Reactor. Measuring the Grounded Electrode Fitting Vprb2 vs Iprb1 to obtain: Rsheath and Vf(0) Preliminary overview of measurements: Sheath Resistance vs. electron density Argon, Helium and Nitrogen at 250 mTorr Sheath resistance explanation: Ar, He and N2: Vf(0) vs. ne at 250 mTorr
University of Texas at Dallas, P.O. Box 830688, EC33 Richardson, TX 75083-0688 Tel: (972)883-2154 Fax: (972)883-6839 email: overzet@utdallas.edu Return to Department of Electrical Engineering Home Page |